AS ISO 14237:2006 pdf download.Surface chemical analysis-Secondary-ion mass spectrometry-Determination of boron atomic concentration in silicon using uniformly doped materials.
7.6 Measurement of test specimen
7.6.1 Measurement procedure
Test specimens shall be measured under the same conditions as stipulated In 7.5.2.
Ion intensity ratios of boron to silicon shall be determined for each measurement cycle by cycle at one measurement position, and then a mean value tot all the measurement cycles shall be calculated. The mean value obtained shall be further averaged for three measurement positions.
7.6.2 Determination of working relative-sensitivity factor
7.6.2.1 Use one of the previously calibrated bulk RMs to determine the working relative-sensitivity factor and the mass discrimination correction factor for the test specimen measurement. It is recommended that the bulk PM be selected whose boron ion intensity is as close to those in the test specimens as possible. Use the calibrated boron atomic concentration determined in 7.5.3 as the reference value,
NOTE Use of RM-A is net recommended when boron-Ion intents for the sample are lower than i x 102 countss.
7.6.2.2 The bulk RM chosen and the RM-BG shall be measured under the same conditions as the test specimens on the same day, following the procedures stipulated in 7.5.2.
Ion intensity ratios of each boron isotope to silicon shall be determined for each measurement cycle by cycle at one measurement position, and then a mean value for all the measurement cycles shall be calculated, The mean value obtained shall be further averaged for three measurement positions.
7.6.1 Measurement procedure
Test specimens shall be measured under the same conditions as stipulated In 7.5.2.
Ion intensity ratios of boron to silicon shall be determined for each measurement cycle by cycle at one measurement position, and then a mean value tot all the measurement cycles shall be calculated. The mean value obtained shall be further averaged for three measurement positions.
7.6.2 Determination of working relative-sensitivity factor
7.6.2.1 Use one of the previously calibrated bulk RMs to determine the working relative-sensitivity factor and the mass discrimination correction factor for the test specimen measurement. It is recommended that the bulk PM be selected whose boron ion intensity is as close to those in the test specimens as possible. Use the calibrated boron atomic concentration determined in 7.5.3 as the reference value,
NOTE Use of RM-A is net recommended when boron-Ion intents for the sample are lower than i x 102 countss.
7.6.2.2 The bulk RM chosen and the RM-BG shall be measured under the same conditions as the test specimens on the same day, following the procedures stipulated in 7.5.2.
Ion intensity ratios of each boron isotope to silicon shall be determined for each measurement cycle by cycle at one measurement position, and then a mean value for all the measurement cycles shall be calculated, The mean value obtained shall be further averaged for three measurement positions.
